Sputtering pressure influence on growth morphology, surface roughness, and electrical resistivity for strong anisotropy beryllium film
罗炳池, 李恺, 康晓丽, 张吉强, 何玉丹, 罗江山, 吴卫东, 唐永建
Sputtering pressure influence on growth morphology, surface roughness, and electrical resistivity for strong anisotropy beryllium film
Luo Bing-Chi (罗炳池), Li Kai (李恺), Kang Xiao-Li (康晓丽), Zhang Ji-Qiang (张吉强), He Yu-Dan (何玉丹), Luo Jiang-Shan (罗江山), Wu Wei-Dong (吴卫东), Tang Yong-Jian (唐永建)
中国物理B
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2014, (6): 66804
-066804
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DOI: 10.1088/1674-1056/23/6/066804