Occurrence and elimination of in-plane misoriented crystals in AlN epilayers on sapphire via pre-treatment control
王虎, 熊晖, 吴志浩, 余晨辉, 田玉, 戴江南, 方妍妍, 张健宝, 陈长清
Occurrence and elimination of in-plane misoriented crystals in AlN epilayers on sapphire via pre-treatment control
Wang Hu (王虎), Xiong Hui (熊晖), Wu Zhi-Hao (吴志浩), Yu Chen-Hui (余晨辉), Tian Yu (田玉), Dai Jiang-Nan (戴江南), Fang Yan-Yan (方妍妍), Zhang Jian-Bao (张健宝), Chen Chang-Qing (陈长清)
中国物理B
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2014, (2): 28101
-028101
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DOI: 10.1088/1674-1056/23/2/028101