Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

邱华诚, Dara Feili, 吴学忠, Helmut Seidel

Qiu Hua-Cheng (邱华诚), Dara Feili, Wu Xue-Zhong (吴学忠), Helmut Seidel

中国物理B . 2014, (2): 27701 -027701 . DOI: 10.1088/1674-1056/23/2/027701