Effects of high temperature rapid thermal annealing on Ge films grown on Si(001) substrate
刘智, 成步文, 李亚明, 李传波, 薛春来, 王启明
Effects of high temperature rapid thermal annealing on Ge films grown on Si(001) substrate
Liu Zhi (刘智), Cheng Bu-Wen (成步文), Li Ya-Ming (李亚明), Li Chuan-Bo (李传波), Xue Chun-Lai (薛春来), Wang Qi-Ming (王启明)
中国物理B
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2013, (11): 116804
-116804
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DOI: 10.1088/1674-1056/22/11/116804