Evidence of GeO volatilization and its effect on the characteristics of HfO
2 grown on Ge substrate
樊继斌, 刘红侠, 费晨曦, 马飞, 范晓娇, 郝跃
Evidence of GeO volatilization and its effect on the characteristics of HfO
2 grown on Ge substrate
Fan Ji-Bin (樊继斌), Liu Hong-Xia (刘红侠), Fei Cheng-Xi (费晨曦), Ma Fei (马飞), Fan Xiao-Jiao (范晓娇), Hao Yue (郝跃)
中国物理B
.
2013, (3): 37702
-037702
.
DOI: 10.1088/1674-1056/22/3/037702