Effect of pulsed bias on properties of ZrN/TiZrN films deposited by cathodic vacuum arc
张国平, 王兴权, 吕国华, 周澜, 黄骏, 陈维, 杨思泽
Effect of pulsed bias on properties of ZrN/TiZrN films deposited by cathodic vacuum arc
Zhang Guo-Ping (张国平), Wang Xing-Quan (王兴权), Lü Guo-Hua (吕国华), Zhou Lan (周澜), Huang Jun (黄骏), Chen Wei (陈维), Yang Si-Ze (杨思泽)
中国物理B
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2013, (3): 35204
-035204
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DOI: 10.1088/1674-1056/22/3/035204