Enhancing the thermal conductivity of polymer-assisted deposited Al
2O
3 film by nitrogen doping
黄江, 张胤, 潘泰松, 曾波, 胡国华, 林媛
Enhancing the thermal conductivity of polymer-assisted deposited Al
2O
3 film by nitrogen doping
Huang Jiang (黄江), Zhang Yin (张胤), Pan Tai-Song (潘泰松), Zeng Bo (曾波), Hu Guo-Hua (胡国华), Lin Yuan (林媛)
Chin. Phys. B
.
2012, (12): 126501
-126501
.
DOI: 10.1088/1674-1056/21/12/126501
|
|
|