Fabrication of Ti ohmic contact to n-type 6H-SiC without high-temperature annealing
常少辉, 刘学超, 黄维, 熊泽, 杨建华, 施尔畏
Fabrication of Ti ohmic contact to n-type 6H-SiC without high-temperature annealing
Chang Shao-Hui (常少辉), Liu Xue-Chao (刘学超), Huang Wei (黄维), Xiong Ze (熊泽), Yang Jian-Hua (杨建华), Shi Er-Wei (施尔畏)
中国物理B
.
2012, (9): 96801
-096801
.
DOI: 10.1088/1674-1056/21/9/096801