Mechanical properties of silicon nanobeams with undercut evaluated by combining dynamic resonance test and finite element analysis
张加宏, 冒晓莉, 刘清惓, 顾芳, 李敏, 刘恒, 葛益娴
Mechanical properties of silicon nanobeams with undercut evaluated by combining dynamic resonance test and finite element analysis
Zhang Jia-Hong (张加宏), Mao Xiao-Li (冒晓莉), Liu Qing-Quan (刘清惓), Gu Fang (顾芳), Li Min (李敏), Liu Heng (刘恒), Ge Yi-Xian (葛益娴 )
中国物理B
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2012, (8): 86101
-086101
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DOI: 10.1088/1674-1056/21/8/086101