Investigation of 4H–SiC metal–insulation–semiconductor structure with Al
2O
3/SiO
2 stacked dielectric
汤晓燕, 宋庆文, 张玉明, 张义门, 贾仁需, 吕红亮, 王悦湖
Investigation of 4H–SiC metal–insulation–semiconductor structure with Al
2O
3/SiO
2 stacked dielectric
Tang Xiao-Yan (汤晓燕), Song Qing-Wen (宋庆文), Zhang Yu-Ming (张玉明), Zhang Yi-Men (张义门), Jia Ren-Xu (贾仁需), Lü Hong-Liang (吕红亮), Wang Yue-Hu (王悦湖 )
中国物理B
.
2012, (8): 87701
-087701
.
DOI: 10.1088/1674-1056/21/8/087701