Abnormal oxidation in nickel silicide and nickel germanosilicide in sub-micro CMOS

汪涛, 郭清, 刘艳, Yun Janggn

Wang Tao(汪涛), Guo Qing(郭清), Liu Yan(刘艳), and Yun Janggn

中国物理B . 2012, (6): 68502 -068502 . DOI: 10.1088/1674-1056/21/6/068502