Influence of Boron doping on microcrystalline silicon growth
李新利, 陈永生, 杨仕娥, 谷锦华, 卢景霄, 郜小勇, 李瑞, 焦岳超, 高海波, 王果
Influence of Boron doping on microcrystalline silicon growth
Li Xin-Li(李新利), Chen Yong-Sheng(陈永生), Yang Shi-E(杨仕娥), Gu Jin-Hua(谷锦华), Lu Jing-Xiao(卢景霄), Gao Xiao-Yong(郜小勇), Li Rui(李瑞), Jiao Yue-Chao(焦岳超), Gao Hai-Bo(高海波), and Wang Guo(王果)
中国物理B
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2011, (9): 96801
-096801
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DOI: 10.1088/1674-1056/20/9/096801