Evolution of infrared spectra and optical emission spectra in hydrogenated silicon thin films prepared by VHF-PECVD
侯国付, 耿新华, 张晓丹, 孙建, 张建军, 赵颖
Evolution of infrared spectra and optical emission spectra in hydrogenated silicon thin films prepared by VHF-PECVD
Hou Guo-Fu(侯国付), Geng Xin-Hua(耿新华), Zhang Xiao-Dan(张晓丹), Sun Jian(孙建), Zhang Jian-Jun(张建军), and Zhao Ying(赵颖)
中国物理B
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2011, (7): 77802
-077802
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DOI: 10.1088/1674-1056/20/7/077802