Identification and elimination of inductively coupled plasma-induced defects in Al
xGa
1 - xN/GaN heterostructures
林芳, 沈波, 卢励吾, 刘新宇, 魏珂, 许福军, 王彦, 马楠, 黄俊
Identification and elimination of inductively coupled plasma-induced defects in Al
xGa
1 - xN/GaN heterostructures
Lin Fang(林芳), Shen Bo(沈波), Lu Li-Wu(卢励吾), Liu Xin-Yu(刘新宇), Wei Ke(魏珂), Xu Fu-Jun(许福军), Wang Yan(王彦), Ma Nan(马楠), and Huang Jun(黄俊)
中国物理B
.
2011, (7): 77303
-077303
.
DOI: 10.1088/1674-1056/20/7/077303