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Measurement accuracy analysis of the free carrier absorption determination of the electronic transport properties of silicon wafers
张希仁, 高椿明, 周鹰, 王占平
Measurement accuracy analysis of the free carrier absorption determination of the electronic transport properties of silicon wafers
Zhang Xi-Ren(张希仁), Gao Chun-Ming(高椿明), Zhou Ying(周鹰), and Wang Zhan-Ping(王占平)
中国物理B . 2011, (
6
): 68105 -068105 . DOI: 10.1088/1674-1056/20/6/068105