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A hybrid model for the charging process of the amorphous SiO
2
film in radio frequency microelectromechanical system capacitive switches
王立峰, 黄庆安, 唐洁影, 廖小平
A hybrid model for the charging process of the amorphous SiO
2
film in radio frequency microelectromechanical system capacitive switches
Wang Li-Feng(王立峰), Huang Qing-An(黄庆安),Tang Jie-Ying(唐洁影),and Liao Xiao-Ping(廖小平)
中国物理B . 2011, (
3
): 37701 -037701 . DOI: 10.1088/1674-1056/20/3/037701