Enhanced etching of silicon dioxide guided by carbon nanotubes in HF solution
赵华波, 应轶群, 严峰, 魏芹芹, 傅云义, 张岩, 李彦, 魏子钧, 张朝晖
Enhanced etching of silicon dioxide guided by carbon nanotubes in HF solution
Zhao Hua-Bo(赵华波), Ying Alex Yi-Qun(应轶群), Yan Feng(严峰), Wei Qin-Qin(魏芹芹), Fu Yun-Yi(傅云义), Zhang Yan(张岩), Li Yan(李彦), Wei Zi-Jun(魏子钧), and Zhang Zhao-Hui(张朝晖)
中国物理B
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2011, (10): 108103
-108103
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DOI: 10.1088/1674-1056/20/10/108103