Thermal annealing induced photocarrier radiometry enhancement for ion implanted silicon wafers

刘显明, 李斌成, 黄秋萍

Liu Xian-Ming(刘显明), Li Bin-Cheng(李斌成), and Huang Qiu-Ping(黄秋萍)

中国物理B . 2010, (9): 97201 -097201 . DOI: 10.1088/1674-1056/19/9/097201