Thickness dependence of grain size and surface roughness for dc magnetron sputtered Au films

张鑫, 宋小会, 张殿琳

Zhang Xin(张鑫), Song Xiao-Hui(宋小会), and Zhang Dian-Lin(张殿琳)

中国物理B . 2010, (8): 86802 -086802 . DOI: 10.1088/1674-1056/19/8/086802