A novel method for sacrificial layer release in MEMS devices fabrication
石莎莉, 陈大鹏, 景玉鹏, 欧毅, 叶甜春, 徐秋霞
A novel method for sacrificial layer release in MEMS devices fabrication
Shi Sha-Li (石莎莉), Chen Da-Peng (陈大鹏), Jing Yu-Peng (景玉鹏), Ou Yi (欧毅), Ye Tian-Chun (叶甜春), Xu Qiu-Xia (徐秋霞)
中国物理B
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2010, (7): 76802
-076802
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DOI: 10.1088/1674-1056/19/7/076802