A novel anti-shock silicon etching apparatus for solving diaphragm release problems
石莎莉, 陈大鹏, 欧毅, 景玉鹏, 徐秋霞, 叶甜春
A novel anti-shock silicon etching apparatus for solving diaphragm release problems
Shi Sha-Li(石莎莉), Chen Da-Peng(陈大鹏), Ou Yi(欧毅), Jing Yu-Peng(景玉鹏), Xu Qiu-Xia(徐秋霞), and Ye Tian-Chun(叶甜春)
中国物理B
.
2010, (6): 60701
-060701
.
DOI: 10.1088/1674-1056/19/6/060701