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Comparative studies of Ge and Si p-channel metal-oxide-semiconductor field-effect-transistors with HfSiON dielectric and TaN metal gate
胡爱斌, 徐秋霞
Comparative studies of Ge and Si p-channel metal-oxide-semiconductor field-effect-transistors with HfSiON dielectric and TaN metal gate
Hu Ai-Bin(胡爱斌) and Xu Qiu-Xia(徐秋霞)
中国物理B . 2010, (
5
): 57302 -057302 . DOI: 10.1088/1674-1056/19/5/057302