Effects of AlN nucleation layer thickness on crystal quality of AlN grown by plasma-assisted molecular beam epitaxy
任凡, 郝智彪, 胡健楠, 张辰, 罗毅
Effects of AlN nucleation layer thickness on crystal quality of AlN grown by plasma-assisted molecular beam epitaxy
Ren Fan(任凡), Hao Zhi-Biao(郝智彪), Hu Jian-Nan(胡健楠), Zhang Chen(张辰), and Luo Yi(罗毅)
中国物理B . 2010, (11): 116801 -117101 .  DOI: 10.1088/1674-1056/19/11/116801