Investigation of the lateral spread of erbium ions implanted in silicon crystal

秦希峰, 陈明, 王雪林, 梁毅, 张少梅

Qin Xi-Feng(秦希峰), Chen Ming(陈明), Wang Xue-Lin(王雪林), Liang Yi(梁毅), and Zhang Shao-Mei(张少梅)

中国物理B . 2010, (11): 113403 -113501 . DOI: 10.1088/1674-1056/19/11/113403