The etching of
a-plane GaN epilayers grown by metal–organic chemical vapour deposition
许晟瑞, 郝跃, 张进成, 周小伟, 曹艳荣, 欧新秀, 毛维, 杜大超, 王昊
The etching of
a-plane GaN epilayers grown by metal–organic chemical vapour deposition
Xu Sheng-Rui(许晟瑞), Hao Yue(郝跃), Zhang Jin-Cheng(张进成), Zhou Xiao-Wei(周小伟), Cao Yan-Rong(曹艳荣), Ou Xin-Xiu(欧新秀), Mao Wei(毛维), Du Da-Chao(杜大超), and Wang Hao(王昊)
中国物理B
.
2010, (10): 107204
-107204
.
DOI: 10.1088/1674-1056/19/10/107204