Deposition pressure effect on the surface roughness scaling of microcrystalline silicon films

朱志立, 丁艳丽, 王志永, 谷锦华, 卢景霄

Zhu Zhi-Li(朱志立), Ding Yan-Li(丁艳丽), Wang Zhi-Yong(王志永), Gu Jin-Hua(谷锦华), and Lu Jing-Xiao(卢景霄)

中国物理B . 2010, (10): 106803 -106803 . DOI: 10.1088/1674-1056/19/10/106803