Influence of oxygen on the growth of cubic boron nitride thin films by plasma-enhanced chemical vapour deposition

杨杭生, 聂安民, 邱发敏

Yang Hang-Sheng(杨杭生), Nie An-Min(聂安民), and Qiu Fa-Min(邱发敏)

中国物理B . 2010, (1): 17202 -017202 . DOI: 10.1088/1674-1056/19/1/017202