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Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer
朱腾飞, 谭炳辉, 潘雪丰, 陶卫东
Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laserand matched photopolymer
Zhu Teng-Fei(朱腾飞), Tan Bing-Hui(谭炳辉), Pan Xue-Feng(潘雪丰), and Tao Wei-Dong(陶卫东)
中国物理B . 2010, (
1
): 14218 -014218 . DOI: 10.1088/1674-1056/19/1/014218