The improvement of Al
2O
3/AlGaN/GaN MISHEMT performance by N
2 plasma pretreatment
冯倩, 田园, 毕志伟, 岳远征, 倪金玉, 进成, 郝跃, 杨林安
The improvement of Al
2O
3/AlGaN/GaN MISHEMT performance by N
2 plasma pretreatment
Feng Qian(冯倩), Tian Yuan(田园), Bi Zhi-Wei(毕志伟), Yue Yuan-Zheng(岳远征), Ni Jin-Yu(倪金玉), Zhang Jin-Cheng(张进成), Hao Yue(郝跃), and Yang Lin-An(杨林安)
中国物理B
.
2009, (7): 3014
-3017
.
DOI: 10.1088/1674-1056/18/7/066