An oxide filled extended trench gate super junction MOSFET structure
王彩琳, 孙军
An oxide filled extended trench gate super junction MOSFET structure
Wang Cai-Lin(王彩琳) and Sun Jun(孙军)
中国物理B . 2009, (3): 1231 -1236 .  DOI: 10.1088/1674-1056/18/3/065