Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor
李志明, 郝跃, 张进成, 许晟瑞, 倪金玉, 周小伟
Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor
Li Zhi-Ming(李志明),Hao Yue(郝跃), Zhang Jin-Cheng(张进成), Xu Sheng-Rui(许晟瑞), Ni Jin-Yu(倪金玉), and Zhou Xiao-Wei(周小伟)
中国物理B
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2009, (11): 5072
-5077
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DOI: 10.1088/1674-1056/18/11/077