The theoretic analysis of maskless surface plasmon resonant interference lithography by prism coupling
方亮, 杜惊雷, 郭小伟, 王景全, 张志友, 罗先刚, 杜春雷
The theoretic analysis of maskless surface plasmon resonant interference lithography by prism coupling
Fang Liang(方亮), Du Jing-Lei(杜惊雷), Guo Xiao-Wei(郭小伟), Wang Jing-Quan(王景全), Zhang Zhi-You(张志友), Luo Xian-Gang(罗先刚), and Du Chun-Lei(杜春雷)
中国物理B
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2008, (7): 2499
-2503
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DOI: 10.1088/1674-1056/17/7/025