Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna

徐旭, 李林森, 刘峰, 周前红, 梁荣庆

Xu Xu (徐旭), Li Lin-Sen (李林森), Liu Feng (刘峰), Zhou Qian-Hong (周前红), Liang Rong-Qing (梁荣庆)

中国物理B . 2008, (11): 4242 -4246 . DOI: 10.1088/1674-1056/17/11/047