Yield estimation of metallic layers in integrated circuits
王俊平, 郝跃, 张俊明
Yield estimation of metallic layers in integrated circuits
Wang Jun-Ping(王俊平), Hao Yue(郝跃), and Zhang Jun-Ming(张俊明)
中国物理B . 2007, (6): 1796 -1805 .  DOI: 10.1088/1009-1963/16/6/054