Formation mechanism of incubation layers in the initial stage of microcrystalline silicon growth by PECVD
侯国付, 薛俊明, 郭群超, 孙建, 赵颖, 耿新华, 李乙钢
Formation mechanism of incubation layers in the initial stage of microcrystalline silicon growth by PECVD
Hou Guo-Fu(侯国付), Xue Jun-Ming(薛俊明), Guo Qun-Chao(郭群超), Sun Jian(孙建), Zhao Ying(赵颖), Geng Xin-Hua(耿新华), and Li Yi-Gang(李乙钢)
中国物理B
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2007, (2): 553
-557
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DOI: 10.1088/1009-1963/16/2/045