Schottky barrier MOSFET structure with silicide source/drain on buried metal
李定宇, 孙雷, 张盛东, 王漪, 刘晓彦, 韩汝琦
Schottky barrier MOSFET structure with silicide source/drain on buried metal
Li Ding-Yu(李定宇), Sun Lei(孙雷), Zhang Sheng-Dong (张盛东), Wang Yi(王漪), Liu Xiao-Yan(刘晓彦), and Han Ru-Qi(韩汝琦)
中国物理B
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2007, (1): 240
-244
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DOI: 10.1088/1009-1963/16/1/041