The role of hydrogen in hydrogenated microcrystalline silicon film and in deposition process with VHF-PECVD technique

杨恢东, 苏中义

Yang Hui-Dong (杨恢东), Su Zhong-Yi (苏中义)

中国物理B . 2006, (6): 1374 -1378 . DOI: 10.1088/1009-1963/15/6/041