The influence of SiN
x substrate on crystallinity of μc-Si film used in thin film transistors
李娟, 吴春亚, 刘建平, 赵淑芸, 孟志国, 熊绍珍, 张丽珠
The influence of SiN
x substrate on crystallinity of μc-Si film used in thin film transistors
Li Juan (李娟), Wu Chun-Ya (吴春亚), Liu Jian-Ping (刘建平), Zhao Shu-Yun (赵淑芸), Meng Zhi-Guo (孟志国), Xiong Shao-Zhen (熊绍珍), Zhang Li-Zhu (张丽珠)
中国物理B
.
2006, (6): 1330
-1334
.
DOI: 10.1088/1009-1963/15/6/033