Nickel-disilicide-assisted excimer laser crystallization of amorphous silicon
廖燕平, 邵喜斌, 郜峰利, 骆文生, 吴渊, 付国柱, 荆海, 马凯
Nickel-disilicide-assisted excimer laser crystallization of amorphous silicon
Liao Yan-Ping (廖燕平), Shao Xi-Bin (邵喜斌), Gao Feng-Li (郜峰利), Luo Wen-Sheng (骆文生), Wu Yuan (吴渊), Fu Guo-Zhu (付国柱), Jing Hai (荆海), Ma Kai (马凯)
中国物理B
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2006, (6): 1310
-1314
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DOI: 10.1088/1009-1963/15/6/029