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OES study of the gas phase during diamond films deposition in high power DC arc plasma jet CVD system
周祖源, 陈广超, 唐伟忠, 吕反修
OES study of the gas phase during diamond films deposition in high power DC arc plasma jet CVD system
Zhou Zu-Yuan (周祖源), Chen Guang-Chao (陈广超), Tang Wei-Zhong (唐伟忠), Lü Fan-Xiu (吕反修)
中国物理B . 2006, (
5
): 980 -984 . DOI: 10.1088/1009-1963/15/5/019