Spatial distribution of electron characteristic in argon rf glow discharges
祝祖送, 林揆训, 林璇英, 邱桂明, 余云鹏, 罗以琳
Spatial distribution of electron characteristic in argon rf glow discharges
Zhu Zu-Song (祝祖送), Lin Kui-Xun (林揆训), Lin Xuan-Ying (林璇英), Qiu Gui-Ming (邱桂明), Yu Yun-Peng (余云鹏), Luo Yi-Lin (罗以琳)
中国物理B
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2006, (5): 969
-974
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DOI: 10.1088/1009-1963/15/5/017