Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system
何斌, 陈光华, 朱秀红, 张文理, 丁毅, 马占杰, 郜志华, 宋雪梅, 邓金祥
Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system
He Bin (何斌), Chen Guang-Hua (陈光华), Zhu Xiu-Hong (朱秀红), Zhang Wen-Li (张文理), Ding Yi (丁毅), Ma Zhan-Jie (马占杰), Gao Zhi-Hua (郜志华), Song Xue-Mei (宋雪梅), Deng Jin-Xiang (邓金祥)
中国物理B
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2006, (4): 866
-871
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DOI: 10.1088/1009-1963/15/4/035