Silicon-on-nothing MOSFETs fabricated with hydrogenand helium co-implantation
卜伟海, 黄如, 黎明, 田豫, 吴大可, 陈文新, 王阳元
Silicon-on-nothing MOSFETs fabricated with hydrogenand helium co-implantation
Bu Wei-Hai(卜伟海), Huang Ru(黄如), Li Ming(黎明), Tian Yu(田豫), Wu Da-Ke(吴大可), Chan Man-Sun(陈文新), and Wang Yang-Yuan(王阳元)
中国物理B
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2006, (11): 2751
-2755
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DOI: 10.1088/1009-1963/15/11/049