Preparation of high-quality hydrogenated amorphous silicon film with a new microwave electron cyclotron resonance chemical vapour deposition system assisted with hot wire
朱秀红, 陈光华, 阴生毅, 荣延栋, 张文理, 胡跃辉
Preparation of high-quality hydrogenated amorphous silicon film with a new microwave electron cyclotron resonance chemical vapour deposition system assisted with hot wire
Zhu Xiu-Hong (朱秀红), Chen Guang-Hua (陈光华), Yin Sheng-Yi (阴生毅), Rong Yan-Dong (荣延栋), Zhang Wen-Li (张文理), Hu Yue-Hui (胡跃辉)
中国物理B
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2005, (4): 834
-837
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DOI: 10.1088/1009-1963/14/4/035