Influence of the deposition parameters on the transition region of hydrogenated silicon films growth

雷青松, 吴志猛, 耿新华, 赵颖, 奚建平

Lei Qing-Song (雷青松), Wu Zhi-Meng (吴志猛), Geng Xin-Hua (耿新华), Zhao Ying (赵颖), Xi Jian-Ping (奚建平)

中国物理B . 2005, (11): 2342 -2347 . DOI: 10.1088/1009-1963/14/11/034