Fabrication of high growth rate solar-cell-quality μc-Si:H thin films by VHF-PECVD
张晓丹, 赵颖, 朱锋, 孙建, 魏长春, 侯国付, 耿新华, 熊绍珍
Fabrication of high growth rate solar-cell-quality μc-Si:H thin films by VHF-PECVD
Zhang Xiao-Dan (张晓丹), Zhao Ying (赵颖), Zhu Feng (朱锋), Sun Jian (孙建), Wei Chang-Chun (魏长春), Hou Guo-Fu (侯国付), Geng Xin-Hua (耿新华), Xiong Shao-Zhen (熊绍珍)
中国物理B
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2004, (8): 1370
-1374
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DOI: 10.1088/1009-1963/13/8/034