Influence of ion species ratio on grid-enhanced plasma source ion implantation
王久丽, 张谷令, 刘元富, 王友年, 刘赤子, 杨思泽
Influence of ion species ratio on grid-enhanced plasma source ion implantation
Wang Jiu-Li (王久丽), Zhang Gu-Ling (张谷令), Liu Yuan-Fu (刘元富), Wang You-Nian (王友年), Liu Chi-Zi (刘赤子), Yang Si-Ze (杨思泽)
中国物理B
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2004, (1): 65
-70
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DOI: 10.1088/1009-1963/13/1/013