The reliability of measurements on electron energy distribution function in silane rf glow discharges
林揆训, 林璇英, 池凌飞, 余楚迎, 姚若河, 余云鹏
The reliability of measurements on electron energy distribution function in silane rf glow discharges
Lin Kui-Xun (林揆训), Lin Xuan-Ying (林璇英), Chi Ling-Fei (池凌飞), Yu Chu-Ying (余楚迎), Yao Ruo-He (姚若河), Yu Yun-Peng (余云鹏)
中国物理B
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2003, (2): 198
-203
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DOI: 10.1088/1009-1963/12/2/314