Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing
王永谦, 廖显伯, 刁宏伟, 张世斌, 徐艳月, 陈长勇, 陈维德, 孔光临
Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing
Wang Yong-Qian (王永谦), Liao Xian-Bo (廖显伯), Diao Hong-Wei (刁宏伟), Zhang Shi-Bin (张世斌), Xu Yan-Yue (徐艳月), Chen Chang-Yong (陈长勇), Chen Wei-De (陈维德), Kong Guang-Lin (孔光临)
中国物理B
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2002, (5): 492
-495
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DOI: 10.1088/1009-1963/11/5/315