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ANALYSIS OF THE X-RAY PHOTOELECTRON SPECTRA OF a-SiOCF FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOUR DEPOSITION
丁士进, 王鹏飞, 张卫, 王季陶, Wei William Lee
ANALYSIS OF THE X-RAY PHOTOELECTRON SPECTRA OF a-SiOCF FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOUR DEPOSITION
Ding Shi-jin (丁士进), Wang Peng-fei (王鹏飞), Zhang Wei (张卫), Wang Ji-tao (王季陶), Wei William Lee
中国物理B . 2001, (
4
): 324 -328 . DOI: 10.1088/1009-1963/10/4/312